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Research Papers

Uncertainty Considerations for Nonlinear Dynamics of a Class of MEMS Switches Undergoing Tip Contact Bouncing

[+] Author and Article Information
Mohamed Bognash

Department of Mechanical and
Materials Engineering,
Western University,
London, ON N6A 5B9, Canada
e-mail: mbognash@uwo.ca

Samuel F. Asokanthan

Mem. ASME
Professor
Department of Mechanical and
Materials Engineering,
Western University,
London, ON N6A 5B9, Canada
e-mail: sasokant@uwo.ca

1Corresponding author.

Contributed by the Design Engineering Division of ASME for publication in the JOURNAL OF COMPUTATIONAL AND NONLINEAR DYNAMICS. Manuscript received June 1, 2018; final manuscript received October 11, 2018; published online January 7, 2019. Assoc. Editor: Radu Serban.

J. Comput. Nonlinear Dynam 14(2), 021014 (Jan 07, 2019) (8 pages) Paper No: CND-18-1248; doi: 10.1115/1.4041773 History: Received June 01, 2018; Revised October 11, 2018

Batch fabrication processes used to produce micro-electro-mechanical systems (MEMS) are prone to uncertainties in the system geometrical and contact parameters as well as material properties. However, since the common design method for these systems is typically based on precise deterministic assumptions, it is necessary to get more insight into their variations. To this end, understanding the influences of uncertainties accompanied by these processes on the system performance and reliability is warranted. The present paper focuses on predictions of uncertainty measures for MEMS switches based on the transient dynamic response, in particular, the bouncing behavior. To understand and quantify the influence of pertinent parameters on the bouncing effects, suitable mathematical model that captures the bouncing dynamics as well as the forces that are dominant at this micron scale are employed. Measure of performance in terms of second-order statistics is performed, particularly for the beam as well as beam tip parameters since excessive tip bounce is known to degrade switch performance. Thus, the present study focusses on the influence of uncertainties in the beam tip geometry parameters such as beam tip length/width as well as contact asperity variables such as the area asperity density and the radius of asperities. In addition to beam tip parameters, this study quantifies the effects of uncertainties in Young's modulus, beam thickness as well as actuation voltage. These influences on significant switch performance parameters such as initial contact time and maximum bounce height have been quantified in the presence of interactive system nonlinearities.

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References

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Bognash, M. , Wang, T. , and Asokanthan, S. , 2015, “ Bouncing Dynamics Considerations for Micro Switch Design,” 25th Canadian Congress of Applied Mechanics (CANCAM), London, ON, Canada, pp. 779–781.

Figures

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Fig. 1

Typical cantilever beam type microswitch

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Fig. 2

Response computation process

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Fig. 3

Typical switch tip-end response for V=1.25Vth

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Fig. 4

(a) Uncertainties in asperity radius R on maximum bounce height H for actuation voltages 1.25Vth and 1.5Vth. (b) Uncertainties in asperity radius R on initial contact time ti for actuation voltages 1.25Vth and 1.5Vth.

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Fig. 5

(a) Uncertainties in area density of asperities η on maximum bounce height H for actuation voltages 1.25Vth and 1.5Vth. (b) Uncertainties in area density of asperities η on initial contact time ti for actuation voltages 1.25Vth and 1.5Vth.

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Fig. 6

(a) Uncertainties in in beam tip length lT on maximum bounce height H for actuation voltages 1.25Vth and 1.5Vth. (b) Uncertainties in beam tip length lT on initial contact time ti for actuation voltages 1.25Vth and 1.5Vth.

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Fig. 7

(a) Uncertainties in Young's modulus E on maximum bounce height H for actuation voltages 1.25Vth and 1.5Vth. (b) Uncertainties in Young's modulus E on initial contact time ti for actuation voltages 1.25Vth and 1.5Vth.

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Fig. 8

(a) Uncertainties in beam width a on maximum bounce height H for actuation voltages 1.25Vth and 1.5Vth. (b) Uncertainties in beam width a on initial contact time ti for actuation voltages 1.25Vth and 1.5Vth.

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Fig. 9

(a) Uncertainties in beam thickness b on maximum bounce height H for actuation voltages 1.25Vth and 1.5Vth. (b) Uncertainties in beam thickness b on initial contact time ti for actuation voltages 1.25Vth and 1.5Vth.

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Fig. 10

(a) Uncertainties in actuation voltage V on maximum bounce height H. (b) Uncertainties in actuation voltage V on initial contact time ti.

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