0
Research Papers

Modeling and Dynamics of a Self-Sustained Electrostatic Microelectromechanical System

[+] Author and Article Information
C. A. Kitio Kwuimy

Laboratory of Modelling and Simulation in Engineering and Biological Physics, University of Yaounde I, Box 812, Yaounde, Cameroon

P. Woafo1

Laboratory of Modelling and Simulation in Engineering and Biological Physics, University of Yaounde I, Box 812, Yaounde, Cameroonpwoafo1@yahoo.fr

1

Corresponding author.

J. Comput. Nonlinear Dynam 5(2), 021010 (Feb 19, 2010) (7 pages) doi:10.1115/1.4000827 History: Received February 09, 2008; Revised September 22, 2009; Published February 19, 2010; Online February 19, 2010

This paper deals with the study of a model of self-sustained electrostatic microelectromechanical system (MEMS). The electrical part contains two nonlinear components: a nonlinear resistance with a negative slope in the current-voltage characteristics, and a capacitor, having a cubic form as the charge-voltage characteristics. The modal approximation and the finite differences numerical scheme are used to analyze the dynamical behavior of the system: Resonant oscillations and bifurcation diagram leading to chaos are observed for some values of the polarization voltage. Hints of applications of the device are given.

FIGURES IN THIS ARTICLE
<>
Copyright © 2010 by American Society of Mechanical Engineers
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
Figure 1

The self-sustained MEMS

Grahic Jump Location
Figure 2

Amplitude of the electrical and mechanical parts as function of the beam dissipative coefficient for the first resonance. Results from the analytical (curve with point) and semi-analytical (curve with stars) investigations, and finite difference simulation (curve with cross): amplitudes (a) of the electrical part and (b) of the mechanical part.

Grahic Jump Location
Figure 3

Amplitude of the electrical and mechanical parts as function of the beam dissipative coefficients for the second resonanace. Results from the analytical (curve with point) and semi-analytical (curve with stars) investigations, and finite difference simulation (curve with cross): amplitudes (a) of the electrical part and (b) of the mechanical part.

Grahic Jump Location
Figure 4

Lyapunov exponent as function of dc polarization for the first resonance: (a) from modal approximation; (b) from finite difference simulation

Grahic Jump Location
Figure 5

Bifurcation diagram of the mechanical arm as function of dc polarization for the first resonance from modal approximation

Grahic Jump Location
Figure 6

Chaotic phase portrait of the beam deflection for the first resonance: (a) from modal approximation; (b) from finite difference simulation

Grahic Jump Location
Figure 7

Chaotic phase portrait of the electrical variable for the first resonance: (a) from modal approximation; (b) from finite difference simulation

Grahic Jump Location
Figure 8

Bifurcation diagram of the mechanical arm as function of dc polarization for the second state from modal approximation

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In