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Research Papers

Pull-In Retarding in Nonlinear Nanoelectromechanical Resonators Under Superharmonic Excitation

[+] Author and Article Information
Najib Kacem1

 FEMTO-ST, UMR 6174, CNRS–UFC–ENSMM–UTBM, F-25000 Besançon, France e-mail: najib.kacem@femto-st.fr Université de Lyon, CNRS INSA-Lyon, LaMCoS UMR 5259, F-69621 Villeurbanne, France e-mail: sebastien.baguet@insa-lyon.fr CEA/LETI-MINATEC, F-38054 Grenoble, France e-mail: sebastien.hentz@cea.fr Université de Lyon, CNRS INSA-Lyon, LaMCoS UMR 5259, F-69621 Villeurbanne, France e-mail: regis.dufour@insa-lyon.fr

Sébastien Baguet, Sébastien Hentz, Régis Dufour

 FEMTO-ST, UMR 6174, CNRS–UFC–ENSMM–UTBM, F-25000 Besançon, France e-mail: najib.kacem@femto-st.fr Université de Lyon, CNRS INSA-Lyon, LaMCoS UMR 5259, F-69621 Villeurbanne, France e-mail: sebastien.baguet@insa-lyon.fr CEA/LETI-MINATEC, F-38054 Grenoble, France e-mail: sebastien.hentz@cea.fr Université de Lyon, CNRS INSA-Lyon, LaMCoS UMR 5259, F-69621 Villeurbanne, France e-mail: regis.dufour@insa-lyon.fr

1

Address all correspondence to this author.

J. Comput. Nonlinear Dynam 7(2), 021011 (Jan 09, 2012) (8 pages) doi:10.1115/1.4005435 History: Received August 02, 2010; Revised October 31, 2011; Published January 09, 2012; Online January 09, 2012

In order to compensate for the loss of performance when scaling resonant sensors down to NEMS, a complete analytical model, including all main sources of nonlinearities, is presented as a predictive tool for the dynamic behavior of clamped-clamped nanoresonators electrostatically actuated. The nonlinear dynamics of such NEMS under superharmonic resonance of an order half their fundamental natural frequencies is investigated. It is shown that the critical amplitude has the same dependence on the quality factor Q and the thickness h as the case of the primary resonance. Finally, a way to retard the pull-in by decreasing the AC voltage is proposed in order to enhance the performance of NEMS resonators.

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Copyright © 2012 by American Society of Mechanical Engineers
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References

Figures

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Figure 5

(a) Critical thickness determination for different DC voltage (Q = 4900 and Vac = 0.6V). (b) Dependency of the critical amplitude on the thickness (here Ac is the peak of Wmax). (c) Plot of the critical amplitude with respect to the beam thickness.

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Figure 6

(a) Predicted frequency curves for different DC voltage (Q = 3000, h = 1 μm and Vac = 0.4V). (b) Zoom on the escape band and the infinite slope at the phase β = Pi2 for Vdc = 20V.

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Figure 7

Predicted frequency curves (up to pull-in) for different AC and DC polarizations (Q = 3000 and h = 1 μm)

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Figure 8

Dependency of the pull-in amplitude on the AC voltage

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Figure 4

(a) Critical quality factor determination for different DC voltage (h = 500 nm and Vac = 0.6V). (b) Dependency of the critical amplitude on the quality factor (here Ac is the peak of Wmax). (c) Logarithmic plot of the critical amplitude with respect to the quality factor.

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Figure 3

Forced frequency responses of the typical resonator described in Fig. 1 for h = 0.5 μm and Q = 5000. σ is the detuning parameter, and Wmax is the displacement of the beam normalized by the gap gd at its middle point l2. B1 and B2 are the two bifurcation points of a typical hardening behavior.

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Figure 2

Competition between hardening and softening behaviors for different values of the ratio hgd (Wmax is the normalized displacement at the middle of the beam)

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Figure 1

Schema of an electrically actuated microbeam

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