Research Papers

Voltage Response of Primary Resonance of Electrostatically Actuated MEMS Clamped Circular Plate Resonators

[+] Author and Article Information
Dumitru I. Caruntu

Department of Mechanical Engineering,
University of Texas Rio Grande Valley,
1201 W University Drive,
Edinburg, TX 78539
e-mails: dumitru.caruntu@utrgv.edu;

Reynaldo Oyervides

Department of Mechanical Engineering,
University of Texas Rio Grande Valley,
1201 W University Drive,
Edinburg, TX 78539
e-mail: reynaldo64@hotmail.com

1Corresponding author.

Contributed by the Design Engineering Division of ASME for publication in the JOURNAL OF COMPUTATIONAL AND NONLINEAR DYNAMICS. Manuscript received January 31, 2015; final manuscript received March 22, 2016; published online May 13, 2016. Assoc. Editor: Daniel J. Segalman.The United States Government retains, and by accepting the article for publication, the publisher acknowledges that the United States Government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this work, or allow others to do so, for United States government purposes.

J. Comput. Nonlinear Dynam 11(4), 041021 (May 13, 2016) (7 pages) Paper No: CND-15-1032; doi: 10.1115/1.4033252 History: Received January 31, 2015; Revised March 22, 2016

This paper investigates the voltage–amplitude response of soft alternating current (AC) electrostatically actuated micro-electro-mechanical system (MEMS) clamped circular plates for sensing applications. The case of soft AC voltage of frequency near half natural frequency of the plate is considered. Soft AC produces small to very small amplitudes away from resonance zones. Nearness to half natural frequency results in primary resonance of the system, which is investigated using the method of multiple scales (MMS) and numerical simulations using reduced order model (ROM) of seven terms (modes of vibration). The system is assumed to be weakly nonlinear. Pull-in instability of the voltage–amplitude response and the effects of detuning frequency and damping on the response are reported.

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Fig. 1

MEMS uniform clamped circular plate of radius R and thickness h suspended above ground plate at a gap distance d

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Fig. 2

First three mode shapes of vibration for clamped circular plates with r=0 the center of plate, and r=1 the edge

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Fig. 3

Voltage response for MEMS clamped circular plate using MMS and seven terms ROM, μ=0.005, σ=−0.005

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Fig. 4

Time response for MEMS clamped circular plate for 7T ROM, δ=0.03, μ=0.005, σ=−0.005, initial amplitude U0 = 0.95

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Fig. 5

Time response for MEMS clamped circular plate for 7T ROM, δ=0.05, μ=0.005, σ=−0.005, initial amplitude U0 = 0.95

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Fig. 6

Zoom-in view of high amplitudes of Fig. 6 convergence of ROMs, μ=0.005, σ=−0.005

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Fig. 7

Zoom on the convergence of ROM terms from Fig. 5, μ=0.005, σ=−0.005

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Fig. 8

Effect of frequency parameter σ on the voltage response for MEMS clamped circular plate using MMS and seven term ROM, μ=0.005

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Fig. 9

Effect of damping parameter μ on the voltage response for MEMS clamped circular plate using MMS and seven term ROM, σ=−0.005




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