Vibrations of a resonant gas sensor under multi-coupled fields

[+] Author and Article Information
Xiaorui Fu

Mechanical engineering institute, Yanshan University, Qinhuangdao, China

Dr. Lizhong Xu

Mechanical engineering institute, Yanshan University, Qinhuangdao, China

1Corresponding author.

ASME doi:10.1115/1.4042292 History: Received March 11, 2018; Revised December 03, 2018


A multi-field coupled dynamic model of a resonant gas sensor is proposed in which molecular force, air damping force, electric field force and the elastic force is considered. The coupled free vibration and forced response of the sensor are studied. Here, L-P method is used to obtain natural frequency of coupled free vibration, the time forced response and the amplitude-frequency characteristics. The micro-resonant gas sensor is fabricated with micromachining method. The frequency measurement of the sensor based on the phase-locked loop is done to illustrate the theoretical analysis. The results are significant for the further miniaturization for resonant gas sensors.

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