Research Papers

Vibrations of a Resonant Gas Sensor Under Multicoupled Fields

[+] Author and Article Information
Xiaorui Fu

Department of Mechanics,
Mechanical Engineering Institute,
Yanshan University,
Qinhuangdao 066004, China
e-mail: fxr@stumail.ysu.edu.cn

Lizhong Xu

Department of Mechanics,
Mechanical Engineering Institute,
Yanshan University,
Qinhuangdao 066004, China
e-mail: Xlz@ysu.edu.cn

1Corresponding author.

Contributed by the Design Engineering Division of ASME for publication in the JOURNAL OF COMPUTATIONAL AND NONLINEAR DYNAMICS. Manuscript received March 11, 2018; final manuscript received December 3, 2018; published online February 15, 2019. Assoc. Editor: Eihab Abdel-Rahman.

J. Comput. Nonlinear Dynam 14(4), 041002 (Feb 15, 2019) (12 pages) Paper No: CND-18-1098; doi: 10.1115/1.4042292 History: Received March 11, 2018; Revised December 03, 2018

In this paper, a dynamics model of a microresonant gas sensor under multifields forces is proposed in which molecular force nonlinearity, gas damping force nonlinearity, and electric field force nonlinearity are considered. The coupled free vibration and forced response of the microsensor are studied. Here, Leibniz–Poincare (L–P) method is used to obtain the natural frequency of microsensor, the time-forced response, and the amplitude–frequency characteristics. Effects of these nonlinearities on the dynamics performance of the microresonant gas sensor are analyzed. The microresonant gas sensor is fabricated, and the frequency measurement of the sensor based on the phase-locked loop is done to illustrate the theoretical analysis. The results are significant for the further miniaturization of resonant gas sensors.

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Fig. 1

Multifield coupled dynamics model of resonant gas sensor: (a) structure model of gas sensor and (b) dynamics model of resonator

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Fig. 2

Natural frequencies as a function of parameters: (a) l changes, (b) v changes, and (c) h changes

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Fig. 3

Frequency difference changes with parameters: (a) l changes, (b) v changes, and (c) h changes

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Fig. 4

Nonlinear vibration response of the sensor for various parameters: (a) ε changes, (b) l changes, (c) h changes, and (d) v changes

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Fig. 5

Amplitude–frequency characteristics of the sensor for various parameters: (a) ε changes, (b) l changes, (c) v changes, and (d) h changes

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Fig. 6

A microresonant gas sensor and its measuring system: (a) resonator, (b) sensor, (c) test schematic, and (d) measuring system

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Fig. 7

Frequency measurements of resonant gas sensor



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