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Research Papers

Vibrations of a Resonant Gas Sensor Under Multicoupled Fields

[+] Author and Article Information
Xiaorui Fu

Department of Mechanics,
Mechanical Engineering Institute,
Yanshan University,
Qinhuangdao 066004, China
e-mail: fxr@stumail.ysu.edu.cn

Lizhong Xu

Department of Mechanics,
Mechanical Engineering Institute,
Yanshan University,
Qinhuangdao 066004, China
e-mail: Xlz@ysu.edu.cn

1Corresponding author.

Contributed by the Design Engineering Division of ASME for publication in the JOURNAL OF COMPUTATIONAL AND NONLINEAR DYNAMICS. Manuscript received March 11, 2018; final manuscript received December 3, 2018; published online February 15, 2019. Assoc. Editor: Eihab Abdel-Rahman.

J. Comput. Nonlinear Dynam 14(4), 041002 (Feb 15, 2019) (12 pages) Paper No: CND-18-1098; doi: 10.1115/1.4042292 History: Received March 11, 2018; Revised December 03, 2018

In this paper, a dynamics model of a microresonant gas sensor under multifields forces is proposed in which molecular force nonlinearity, gas damping force nonlinearity, and electric field force nonlinearity are considered. The coupled free vibration and forced response of the microsensor are studied. Here, Leibniz–Poincare (L–P) method is used to obtain the natural frequency of microsensor, the time-forced response, and the amplitude–frequency characteristics. Effects of these nonlinearities on the dynamics performance of the microresonant gas sensor are analyzed. The microresonant gas sensor is fabricated, and the frequency measurement of the sensor based on the phase-locked loop is done to illustrate the theoretical analysis. The results are significant for the further miniaturization of resonant gas sensors.

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References

DiMeo , F., Jr. , Chen, I. S. , Chen, P. , Neunar, J. , Roehl, A. , and Welch, J. , 2006, “MEMS-Based Hydrogen Gas Sensors,” Sens. Actuators B, 117(1), pp. 10–16. [CrossRef]
Zheng, Y. , 2016, “Research Progress and Application Prospect of Smart Sensor Technology,” Sci. Technol. Rev., 34(17), pp. 72–78. http://www.en.cnki.com.cn/Article_en/CJFDTotal-KJDB201617011.htm
Yuan, W. , 2013, “A Review of Silicon Micromachined Resonant Pressure Sensor,” J. Mech. Eng., 49(20), pp. 2–9. [CrossRef]
Cheng, R. , Zhao, Y. , Li, C. , Li, B. , and Zhang, Q. , 2016, “Modelling and Characterisation of a Micromachined Resonant Pressure Sensor With Piezoelectric Excitation and Sensing,” Micro Nano Lett., 11(6), pp. 326–331. [CrossRef]
Kooser, A. , Gunter, R. L. , Delinger, W. D. , Porter, T. L. , and Eastman, M. P. , 2004, “Gas Sensing Using Embedded Piezoresistive Microcantilever Sensors,” Sens. Actuators B, 99(2), pp. 474–479. [CrossRef]
Wan, Q. , Li, Q. H. , Chen, Y. J. , Wang, T. H. , He, X. L. , Li, J. P. , and Lin, C. L., 2004, “Fabrication and Ethanol Sensing Characteristics of ZnO Nanowire Gas Sensors,” Appl. Phys. Lett., 84(18), pp. 3654–3656. [CrossRef]
Comini, E. , Faglia, G. , Sberveglieri, G. , Pan, Z. , and Wang, Z. L. , 2002, “Stable and Highly Sensitive Gas Sensors Based on Semiconducting Oxide Nanobelts,” Appl. Phys. Lett., 81(10), pp. 1869–1871. [CrossRef]
Vancura, C. , Rüegg, M. , Li, Y. , Hagleitner, C. , and Hierlemann, A. , 2005, “Magnetically Actuated Complementary Metal Oxide Semiconductor Resonant Cantilever Gas Sensor Systems,” Anal. Chem., 77(9), pp. 2690–2699. [CrossRef] [PubMed]
Wang, B. , Zhu, L. F. , Yang, Y. H. , Xu, N. S. , and Yang, G. W. , 2008, “Fabrication of a SnO2 Nanowire Gas Sensor and Sensor Performance for Hydrogen,” J. Phys. Chem. C, 112(17), pp. 6643–6647. [CrossRef]
Zuo, G. , Li, X. , Li, P. , Wang, Y. , Cheng, Z. , and Feng, S. , 2006, “Trace TNT Vapor Detection With an SAM-Functionalized Piezoresistive SiO2 Microcantilever,” Fifth IEEE Conference on Sensors, Daegu, South Korea, Oct. 22–25, pp. 749–752.
Alsaleem, F. M. , Younis, M. I. , and Ouakad, H. M. , 2009, “On the Nonlinear Resonances and Dynamic Pull-In of Electrostatically Actuated Resonators,” J. Micromech. Microeng., 19(4), pp. 755–778. [CrossRef]
Kacem, N. , Hentz, S. , Pinto, D. , Reig, B. , and Nguyen, V. , 2009, “Nonlinear Dynamics of Nanomechanical Beam Resonators: Improving the Performance of NEMS-Based Sensors,” Nanotechnology, 20(27), p. 275501. [CrossRef] [PubMed]
Janbahan, A. A. K. , Ghanbari, A. , and Keyghobadi, J. , 2010, “Investigation of Squeeze Film Effect on Dynamic Characteristics of Electrically Actuated Fully Clamped Micro-Beam,” Sens. Transducers, 123(12), pp. 41–51. http://www.sensorsportal.com/HTML/DIGEST/P_723.htm
Kim, P. , Bae, S. , and Seok, J. , 2012, “Resonant Behaviors of a Nonlinear Cantilever Beam With Tip Mass Subject to an Axial Force and Electrostatic Excitation,” Int. J. Mech. Sci., 64(1), pp. 232–257. [CrossRef]
Shi, H. , Fan, S. , Xing, W. , and Sun, J. , 2015, “Study of Weak Vibrating Signal Detection Based on Chaotic Oscillator in MEMS Resonant Beam Sensor,” Mech. Syst. Signal Process., 50–51, pp. 535–547. [CrossRef]
Xu, L. , and Yang, Q. , 2013, “Time Frequency Property for a Micro Resonant Gas Sensor,” AIP Adv., 3(10), pp. 2229–2253. [CrossRef]
Xu, L. , and Yang, Q. , 2015, “Multi-Field Coupled Dynamics for a Micro Beam,” Mech. Based Des. Struct. Mach., 43(1), pp. 57–73. [CrossRef]
Xu, L. , Qian, F. , and Liu, Y. , 2015, “Effects of Van Der Waals Force on Natural Frequency for Micro Cantilever,” AIP Adv., 5(11), pp. 431–455.
Liu, Y. , Qian, F. , and Xu, L. , 2016, “Four Field Coupled Dynamics for a Micro Resonant Gas Sensor,” J. Vibroeng., 18(2), pp. 717–730. https://www.jvejournals.com/article/16307
Zhao, D. , Liu, J. , and Wang, L. , 2016, “Nonlinear Free Vibration of a Cantilever Nanobeam With Surface Effects: Semi-Analytical Solutions,” Int. J. Mech. Sci., 113, pp. 184–195. [CrossRef]
Sadri, M. , Younesian, D. , and Esmailzadeh, E. , 2016, “Nonlinear Harmonic Vibration and Stability Analysis of a Cantilever Beam Carrying an Intermediate Lumped Mass,” Nonlinear Dyn., 84(3), pp. 1667–1682. [CrossRef]
Poloei, E. , Zamanian, M. , and Hosseini, S. A. A. , 2017, “Nonlinear Vibration Analysis of an Electrostatically Excited Micro Cantilever Beam Coated by Viscoelastic Layer With the Aim of Finding the Modified Configuration,” Struct. Eng. Mech., 61(2), pp. 193–207. [CrossRef]
Liu, W. , and Barkey, M. E. , 2017, “Nonlinear Vibrational Response of a Single Edge Cracked Beam,” J. Mech. Sci. Technol., 31(11), pp. 5231–5243. [CrossRef]
Collins, W. D. , 1989, “Nonlinear Optimal Control Problems and the Method of Multiple Scales,” IMA J. Math. Control Inf., 6(1), pp. 1–20. [CrossRef]

Figures

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Fig. 1

Multifield coupled dynamics model of resonant gas sensor: (a) structure model of gas sensor and (b) dynamics model of resonator

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Fig. 2

Natural frequencies as a function of parameters: (a) l changes, (b) v changes, and (c) h changes

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Fig. 3

Frequency difference changes with parameters: (a) l changes, (b) v changes, and (c) h changes

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Fig. 4

Nonlinear vibration response of the sensor for various parameters: (a) ε changes, (b) l changes, (c) h changes, and (d) v changes

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Fig. 5

Amplitude–frequency characteristics of the sensor for various parameters: (a) ε changes, (b) l changes, (c) v changes, and (d) h changes

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Fig. 6

A microresonant gas sensor and its measuring system: (a) resonator, (b) sensor, (c) test schematic, and (d) measuring system

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Fig. 7

Frequency measurements of resonant gas sensor

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