This paper introduces and experimentally demonstrates the design concept of multistage microturbomachinery, which is fabricated using silicon microfabrication technology. The design process for multistage microscale turbomachinery based on meanline analysis is presented, along with computational fluid dynamics predictions of the key aerodynamic performance parameters required in this design process. This modeling was compared with a microturbine device with a 4 mm diameter rotor and 100μm chord blades, based on microelectromechanical system technology, which was spun to 330,000 rpm and produced 0.38 W of mechanical power. Modeling suggests a turbine adiabatic efficiency of 35% and Re=266 at the maximum speed. The pressure distribution across the blade rows was measured and showed close agreement with the calculation results. Using the model, the microturbine is predicted to produce 3.2 W with an adiabatic efficiency of 63% at a rotor speed of 1.1×106rpm.

1.
Epstein
,
A. H.
, 2004, “
Millimeter-Scale, Micro-Electro-Mechanical Systems Gas Turbine Engines
,”
ASME J. Eng. Gas Turbines Power
0742-4795,
126
, pp.
205
226
.
2.
Isomura
,
K.
,
Murayama
,
M.
,
Yamaguchi
,
H.
,
Ijichi
,
N.
,
Asakura
,
H.
,
Saji
,
N.
,
Shiga
,
O.
,
Takahashi
,
K.
,
Tanaka
,
S.
,
Genda
,
T.
, and
Esashi
,
M.
, 2002, “
Development of Microturbocharger and Microcombustor for a Three-Dimensional Gas Turbine at Microscale
,”
Proceedings of the ASME IGTI Turbo Expo 2002
, Amsterdam, Netherlands, Jun. 6, Paper No. GT-2002-30580.
3.
Epstein
,
A. H.
, and
Senturia
,
S. D.
, 1997, “
Macro Power From Micro Machinery
,”
Science
0036-8075,
276
, p.
1211
.
4.
Epstein
,
A. H.
,
Senturia
,
S. D.
,
Al-Midani
,
O.
,
Ayon
,
A.
,
Breuer
,
K.
,
Chen
,
K. -S.
,
Ehrich
,
F. E.
,
Esteve
,
E.
,
Frechette
,
L.
,
Gauba
,
G.
,
Ghodssi
,
R.
,
Groshenry
,
C.
,
Jacobson
,
S.
,
Kerrebrock
,
J. L.
,
Lang
,
J. H.
,
Lin
,
C. -C.
,
London
,
A.
,
Lopata
,
J.
,
Mehra
,
A.
,
Mur Miranda
,
J. O.
,
Nagle
,
S.
,
Orr
,
D. J.
,
Piekos
,
E.
,
Schmidt
,
M. A.
,
Shirley
,
G.
,
Spearing
,
S. M.
,
Tan
,
C. S.
,
Tzeng
,
Y. -S.
, and
Waitz
,
I. A.
, 1997, “
Micro-Heat Engines, Gas Turbines, and Rocket Engines: The MIT Microengine Project
,”
Proceedings of the 28th AIAA Fluid Dynamics Conference
, Snowmass Village, June 29–July 2, AIAA Paper No. 97-1773.
5.
Fréchette
,
L. G.
,
Lee
,
C.
,
Arslan
,
S.
, and
Liu
,
Y.-C.
, 2003, “
Design of a Microfabricated Rankine Cycle Steam Turbine for Power Generation
,”
Proceedings of the ASME International Mechanical Engineering Congress and Exposition
, Washington, DC, Nov. 16–21.
6.
Kerrebrock
,
J. L.
, 1992,
Aircraft Engines and Gas Turbines
, 2nd ed.,
MIT
,
Cambridge, MA
, p.
478
.
7.
Greitzer
,
E. M.
, 2004,
Internal Flow: Concepts and Applications
,
Cambridge University Press
,
Cambridge, England
.
8.
Lee
,
C.
, 2006, “
Development of a Microfabricated Turbopump for a Rankine Vapor Power Cycle
,” Ph.D. thesis, Columbia University, New York.
9.
Mehra
,
A.
, 1997, “
Computational Investigation and Design of Low Reynolds Number Micro-Turbomachinery
,” MS thesis, Massachusetts Institute of Technology, Cambridge, MA.
10.
Jacobson
,
S. A.
, 1998, “
Aerothermal Challenges in the Design of a Microfabricated Gas Turbine Engine
,”
Proceedings of the 29th Fluid Dynamics Conference
, Albuquerque, NM, June 15–18, AIAA Paper No. 98-2445.
11.
Shirley
,
G.
, 1998, “
An Experimental Investigation of a Low Reynolds Number, High Mach Number Centrifugal Compressor
,” MS thesis, Massachusetts Institute of Technology, Cambridge, MA.
12.
Dunavant
,
J. C.
, and
Erwin
,
J. R.
, 1956, “
Investigation of a Related Series of Turbine Blade Profiles in Cascades
,”
NACA
Technical Note No. 3802.
13.
Schlichting
,
H.
, 1979,
Boundary-Layer Theory
, 7th ed.,
McGraw-Hill
,
New York
, p.
817
.
14.
Lee
C.
,
Liamini
M.
, and
Fréchette
,
L. G.
, “
Design, Fabrication and Characterization of a Micro Turbopump for a Rankine Power Generation—Part II: Fabrication and Characterization
,”
J. Microelectromech. Syst.
, submitted.
15.
Fréchette
,
L. G.
,
Jacobson
,
S. A.
,
Breuer
,
K. S.
,
Ehrich
,
F. F.
,
Ghodssi
,
R.
,
Khanna
,
R.
,
Wong
,
C. W.
,
Zhang
,
X.
,
Schmidt
,
M. A.
, and
Epstein
,
A. H.
, 2005, “
High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings
,”
J. Microelectromech. Syst.
1057-7157,
14
(
1
), pp.
141
152
.
16.
Fréchette
,
L. G.
, 2000, “
Development of a Microfabricated Silicon Motor-Driven Compression System
,” Ph.D. thesis, Massachusetts Institute of Technology, Cambridge, MA.
17.
Horlock
,
J. H.
, 1966,
Axial Flow Turbines
,
Krieger
,
Malabar, FL
.
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